JPS6367242U - - Google Patents
Info
- Publication number
- JPS6367242U JPS6367242U JP16271086U JP16271086U JPS6367242U JP S6367242 U JPS6367242 U JP S6367242U JP 16271086 U JP16271086 U JP 16271086U JP 16271086 U JP16271086 U JP 16271086U JP S6367242 U JPS6367242 U JP S6367242U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- light source
- observation window
- processing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16271086U JPS6367242U (en]) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16271086U JPS6367242U (en]) | 1986-10-23 | 1986-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367242U true JPS6367242U (en]) | 1988-05-06 |
Family
ID=31090234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16271086U Pending JPS6367242U (en]) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367242U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0252425A (ja) * | 1988-08-16 | 1990-02-22 | Tel Sagami Ltd | 縦型熱処理装置 |
-
1986
- 1986-10-23 JP JP16271086U patent/JPS6367242U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0252425A (ja) * | 1988-08-16 | 1990-02-22 | Tel Sagami Ltd | 縦型熱処理装置 |